Influence factors of film adhesion criterion of the nondestructive CZM-SAW technique

Film adhesion can be determined by the surface acoustic wave (SAW) technique combined with the cohesive zone model (CZM) nondestructively and quantitatively. Moreover, the CZM-SAW technique can judge the adhesion quality quantitatively by the adhesion criterion. In this study, adhesion criterions of four kinds of different film materials with a wide thickness range from 50 nm to 6000 nm are simulated to study the influence factors of film adhesion criterion determined by the CZM-SAW technique. Studying influence factors of film adhesion criterion is essential for adhesion quality judgment. In addition, the adhesion criterion deviation caused by measurement error is analyzed. Adhesion properties of six film samples are determined by the CZM-SAW technique and are judged by the adhesion criterion with considering measurement errors. This paper exhibits the unique advantage of the CZM-SAW technique, which is a complete method for characterizing the film adhesion. (C) 2019 The Japan Society of Applied Physics