Secondary electron emission of (Mg-Zn-O)/(MgO-Au) bilayer composite film deposited by sputtering

2019 INTERNATIONAL VACUUM ELECTRONICS CONFERENCE (IVEC)(2019)

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摘要
(Mg-Zn-O)/(MgO-Au) bilayer composite film was proposed, and the influence of Zn-doping concentration on the surface morphology, electronic structure and electron-induced secondary electron emission (SEE) performance of this composite film was investigated. The investigation results show that the Zn doping with a low concentration in the MgO surface layer brings about the enlargement of grain size and the reductions of both bandgap and work function of MgO, which leads to the superior SEE performance owned by (Mg-Zn-O)/(MgO-Au) composite film.
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关键词
secondary electron emission, (Mg-Zn-O)/(MgO-Au) bilayer composite film, grain size, bandgap, work function
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