Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose

Matthieu Denoual,Mathieu Pouliquen,Corentin Jorel,Didier Robbes,Julien Grand,Maxime Debost,Svetlana Mintova,Maxime Harnois,Olivier de Sagazan, Shu Inoue,Eric Lebrasseur,Kentaro Yamada,Yuki Okamoto,Yoshio Mita

SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019)（2019）

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摘要

In this paper, we show the integration steps we have undertaken for the integration of a recently proposed new principle for gas detection. Benefits of integration and co-integration of the miniaturized detectors with CMOS electronics will be the realization of arrays of selective detectors resulting in a new kind of electronic nose.

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关键词

thermal gas detection,electronic nose

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