A NEW PASSIVATION SCHEME FOR THE PERFORMANCE ENHANCEMENT OF BLACK SILICON SOLAR CELLS

•Formation of black silicon solar cells was carried using out using etching methods.•MACE process using two different metals was applied to do a nanometric etching on pyramidal surfaces.•A double stack layer of pm-Si/SiNx was employed on the surface of the device and was treated in an ammonia plasma.•I–V measurements and EQE measurements showed better performance of the solar cell device proposed in this work.