Effect of Concentration of Single-Wall Carbon Nanotubes (SWCNTs) in a SWCNTs/ZnO Nanorods Channel-Based Thin-Film Transistor

Journal of Electronic Materials(2019)

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摘要
Fabrication of three thin-film transistor devices by deposition of single-walled carbon nanotubes (SWCNTs) thin film over hydrothermally grown nanorods of zinc oxide (ZnO) on silicon dioxide (SiO 2 ) layered n -type silicon is reported. In this architecture, SWCNTs/ZnO nanorods were used for the channel layer. The silicon dioxide deposited over silicon substrate was used as a dielectric. Three devices were prepared by varying the concentration of carbon nanotubes to investigate the effect on electrical properties of prepared thin-film transistors. XRD and EDX analysis was performed for the study of structural and elemental properties. Scanning electron microscopy (SEM) was used to examine the surface morphology of SWCNTs/ZnO nanorods. Transfer and output characteristics were studied using a Keithley SourceMeter. I – V analysis revealed that an increase in the concentration of carbon nanotubes increased the mobility values and I on / I off , but the threshold voltage was decreased.
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关键词
Carbon nanotubes, thin-film transistors, ZnO nanorods, nano-composites, channel layer
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