A Simple High-Precision Wide-Spectrum Interferometric System

This paper presents a simple system capable of detecting wavefront information in the wavelength range of 488-1064 nm based on an interferometric system consisting of a ball lens and an aspheric collimator. The design is conducive to short-distance Gaussian beam expansion and collimation at multiple wavelengths. The design principles and performance of the system are described in detail; the measurement precision of the system is verified experimentally by measuring the surface profile of a piece of uncoated N-BK7 glass at various test wavelengths with the proposed setup and with a digital 4D FizCam 2000 interferometer. The highly consistent measurement results of the two methods reveal that the proposed system operates precisely and effectively at various wavelengths. Subsequently, the system is applied to measure the transmitted-wavefront error of a solar filter at a wavelength of 808.0 nm; the measurement results show superb repeatability. The proposed technique avoids the shortcomings of conventional single-working-wavelength interferometric systems, which can neither work in a wide spectrum with high precision nor measure the wavefront properties of many optical bandpass elements in one device; this technique also provides technical support for future applications of high-precision and low-cost wavelength-switchable laser interferometers.