Silicon on Insulator with Highly Uniform Top Si Fabricated by H/He Coimplantation

Silicon on insulator with highly uniform top Si is fabricated by co-implantation of H+ and He+ ions. Compared with the conventional ion-slicing process with H implantation only, the co-implanted specimens whose He depth is deeper than H profile have the top Si layer with better uniformity after splitting. In addition, the splitting occurs at the position that the maximum concentration peak of H overlaps with the secondary concentration peak of He after annealing. It is suggested that the H/He co-implantation technology is a promising approach for fabricating fully depleted silicon on insulator.