Suspended Group Iii-V Waveguides Integrated On Silicon Substrates For Mid-Infrared Photonics

Jeff Chiles,Eric J. Stanton,Nima Nader,Jeffrey M. Shainline,Sae Woo Nam,Richard P. Mirin

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

We demonstrate wafer-scale integration of suspended Al0.32Ga0.68As nanophotonic waveguides on silicon substrates. Micro-ring resonators are fabricated and measured at lambda = 1545 and 2305 nm, showing loaded quality factors of 740,000 and 450,000, respectively. (c) 2019 The Author(s)

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