Waveguide-Coupled Disk Resonators On A Crack-Free Si3n4 Film With A Dense Stress Release Pattern

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

We deposit a crack-free 780nm-thick Si3N4 film on a dense stress release pattern on a 100mm silicon wafer. Our fabricated waveguide-coupled 920 mu m-radius Si3N4 disk resonator reveals a high loaded quality factor of 1.7x10(6). (C) 2019 The Author(s)

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