Optimization of 3ω Method for Phase-Change Materials Thermal Conductivity Measurement at High Temperature

2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)(2019)

引用 0|浏览6
暂无评分
摘要
Thermal conductivity (kth) of Ge-rich Ge-Sb-Te phase-change material (GGST) is here investigated at temperatures up to $400\ ^{\circ}\mathrm{C}$ through “3ω method”. We present the engineering of the test vehicle, with the optimization of the metal-based heater to achieve a reliable measurement even at high temperature. Finally, we compare the results from four different approaches, showing which method is more accurate for the kth evaluation in phase-change materials.
更多
查看译文
关键词
Temperature measurement,Heating systems,Thermal conductivity,Conductivity,Silicon compounds,Substrates,Frequency measurement
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要