Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching

We demonstrated a Si-based concave micromirror array for cell trapping that was fabricated by XeF2 vapor etching. We also examined the optical properties of the focal image of each concave micromirror. In addition, yeast cell trapping was realized at the focal point of a concave micromirror of approximately 35 mu m diameter by Kohler illumination using a halogen lamp. The proposed process is useful for the microfabrication of various Si-based microstructure devices, such as microchannels and micro-electromechanical systems (MEMS).