PDMS double casting method enabled by plasma treatment and alcohol passivation

Sensors and Actuators B: Chemical(2019)

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摘要
•A simple and efficient PDMS double casting method using plasma treatment followed by alcohol passivation is described.•Two-step surface treatment ensures double casting performance at a single micron scale resolution.•The method is capable of micron level reproduction of objects featuring high aspect ratios and complex 3D microstructures.
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关键词
Double casting,PDMS,3D microstructure,Micropatterning,High aspect ratio structure
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