Investigation about Elliptical Region Observed on CdZnTe Wafers after Etching Treatment

Delong Zhang,Jiahua Min,Xiaoyan Liang,Shiwen Sun,Jijun Zhang,Jiaxuan Zhang,Chengwei Jin,Shijin Liang,Liwen Ling,Yue Shen,Linjun Wang

Journal of Crystal Growth（2019）

引用 2|浏览8

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摘要

•The elliptical region was observed on the wafer after Everson etching treatment.•Zn component distribution of the wafers with elliptical region was tested by ZCDC.•The morphology and distribution of Te inclusions in elliptical region was observed by IRTM.•The reason for the formation of pearl-string Te inclusions was qualitatively analyzed.•The reason for formation of elliptical region and how to avoid it were mainly discussed.

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关键词

A1. Elliptical region,A1. Te inclusions,A1. Etching,A1. Zn component mapping,B2. CdZnTe

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