Development of high-sensitivity ambient light sensor based on cadmium sulfide-deposited surface acoustic wave sensor

Sensors and Actuators A: Physical(2019)

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摘要
•The SAW sensor is fabricated by employing an input and output bidirectional IDTs patterned on a piezoelectric substrate, 128°Y-X LiNbO3.•The IDT pattern was designed with resonant frequency of 244.5 MHz, a wavelength of 16 μm, an aperture length of 480 μm, a delay line of 560 μm and 70 fingers in each IDT.•Absorbance spectra of cadmium sulfide thin film on LiNbO3 substrate are described in this paper.•Various types of SAW sensors depending on thickness and area are fabricated. The responses to ambient light of each sensor are measured and been compared.
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关键词
Surface acoustic wave,Ambient light sensor,Photosensor,Cadmium sulfide,Absorbance spectrum
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