Influence of oxygen on the synthesis of large area hexagonal boron nitride on Fe2B substrate

Zhiyuan Shi,Qingtian Li,Ren Jiang,Chao Zhang,Weijun Yin,Tianru Wu,Xiaoming Xie

Materials Letters（2019）

引用 4|浏览16

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摘要

•A new growth strategy was demonstrated for synthesis of multilayer h-BN films on Fe2B alloy.•In-situ XPS and XRD illustrate the influence of oxygen during the growth of multilayer h-BN.•By removing residual oxygen in reaction gas, uniform 2D layered h-BN could be obtained.•Various characterizations confirm that the h-BN film is in high quality.

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关键词

Hexagonal boron nitride,Oxygen,Chemical vapor deposition,Thin films

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