Spectroscopic studies to investigate the effect of different plasma parameters on the geometrical and electronic structure of graphene

•Investigate plasma parameters on the graphene geometrical structures.•Graphene films were synthesized by DC-PECVD reactor.•Controlling of graphene layers number and defects in sp2 size domain.•PL spectrum was recorded for the single layer graphene.•Blue shift of the PL peak for the prepared graphene samples.