Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges.

With nanoelectronics reaching the limit of atom-sized devices, it has become critical to examine how irregularities in the local environment can affect device functionality. In this work, we characterize atomic electrostatic irregularities in the near-surface environment of highly-doped hydrogen terminated silicon (100) using non-contact atomic-force-microscopy. Two-dimensional contact potential difference maps show the spatially varying electrostatic potential on the surface. Three types of charged species, two of which are near-surface, are examined. An electric field sensitive spectroscopic signature of a single probe atom reports on nearby charged defects. We experimentally extract the depth of the two near-surface species, local Debye screening length, charge magnitude and sign, and the effective dielectric constant close to the surface. The identity of one of the near-surface defects has been uncertain. That species, suspected of being boron or perhaps a negatively charged donor species, we suggest is of a character more consistent with a negatively-charged interstitial hydrogen, a species often discussed and implicated in studies of solar cells.