Substrate structured Sb2S3 thin film solar cells fabricated by rapid thermal evaporation method

•High quality Sb2S3 film was grown on Mo substrate by RTE method.•Substrate temperature and deposition time were related to improve Sb2S3 thin film quality simultaneously.•The highest PCE of substrate configuration Sb2S3 solar cell was obtained, by now.•The physical origin of the low efficiency was disclosed combined by SCAPS simulation and experimental results.