Apsuny Process Design Kit (Pdkv3.0): O, C And L Band Silicon Photonics Component Libraries On 300mm Wafers

Erman Timurdogan,Zhan Su,Ren-Jye Shiue,Christopher V. Poulton,Matthew J. Byrd, Simon Xin,Michael R. Watts

2019 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)（2019）

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摘要

An updated process design kit (APSUNY PDKv3.0) is introduced with verified passive and active O+C+L band silicon photonics component libraries, which includes 50Gbaud (100Gbps) capable modulators, high yield splitters and detectors on 300mm SOI wafers.

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关键词

APSUNY process design kit,updated process design kit,verified passive O+C+L band silicon photonics component libraries,active O+C+L band silicon photonics component libraries,50Gbaud capable modulators,SOI wafers,APSUNY PDKv3.0,high yield splitters,detectors,size 300.0 mm,Si

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