Monitoring of FinFET Characteristics Using $\Delta V_{\text{DIBLSS}}/(I_{\text{on}}/I_{\text{off}})$ and $\Delta V_{\text{DIBL}}/(I_{\text{on}}/I_{\text{off}})$

In this paper, we present a descriptive analysis of a performance index, ΔVDIBLSS/(Ion/Ioff), used for performance monitoring. Scaled nand p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) (planar and FinFET devices) are included for comparison of performance trends. Also, the simplified ΔVDIBL/(Ion/Ioff) for monitoring the electrical characteristics of MOSFET devices is propo...