Silicon Membranes For Nanophononics

A. Varpula,A. Shchepetov,K. Grigoras,J. Hassel,M. Prunnila,J. Ahopelto

2018 IEEE 18TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)（2018）

引用 0|浏览55

暂无评分

摘要

The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/Hz(1/2) and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit.

查看译文

关键词

nanophononics,thermal conductivity,acoustic phonons,sensitive thermal thermoelectric detectors,low noise equivalent power,relatively fast operation,structure,electrical properties,enhanced phonon scattering,ultrathin freestanding silicon membranes,temperature fluctuation limit,Si

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要