Stability analysis of ion beam figuring removal function based on line scan

In the ion beam figuring(IBF) process, a stable removal function is the premise of ion beam figuring, and the information of removal function is generally obtained by experimental methods. Based on the study of removal function model, the stability of the removal function is analyzed by line scan method. A line scan experiment was performed on a 50mm diameter optical component, within lh, the removal function's peak removal rate varies in 0.74%, full width at half maximum (FWHM) varies in 0.41%, and volume removal rate varies in 2.62%. The removal function is stable and can be used for actual ion beam figuring. Using this method, the stability of the removal function can be verified to ensure that it satisfies the figuring requirements.