Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators

Janna Rodriguez,Gabrielle D. Vukasin, Grant M. Glaze,Matthew A. Hopcroft,Lizmarie Comenencia Ortiz,Chae H. Ahn,Eldwin Ng,Woosung Park,Thomas W. Kenny,Christopher A. Watson

2018 IEEE International Frequency Control Symposium (IFCS)（2018）

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摘要

The aim of this study is to investigate the behavior of the thermal expansion coefficient (CTE) of silicon at different crystallographic orientations through studies of the quality factor, Q, over a wide range of temperatures. We investigate how the observed effects of CTE may deviate from the expected isotropic behavior due to irregularities of fabrication, or because of the influence of doping or other effects.

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关键词

coefficient of thermal expansion (CTE),thermal expansion coefficient,crystallographic orientations,crystal orientations,low temperature,quality factor,anchor damping

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