Influence of porosity and pore size on sputtering of nanoporous structures by low-energy Ar ions: Molecular dynamics study

Applied Surface Science(2019)

引用 20|浏览7
暂无评分
摘要
•Presence of nanosized pores can enhance the sputtering.•Ion irradiation of nanoporous structures can cause the collapse of pores in near-surface layers.•As a result of pore collapse, a continuous solid layer is formed on the material surface.•Excess surface energy per unit volume is a key parameter to determine the probability of pore collapsing.
更多
查看译文
关键词
Nanoporous material,Low-k dielectrics,Plasma treatment,Sputtering,Pore collapse
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要