Using Surface Engineering to Modulate Superconducting Coplanar Microwave Resonator Performance
IEEE Transactions on Applied Superconductivity(2019)
摘要
Superconducting microwave resonators are important components of superconducting quantum information and astronomy detector systems. In this paper, we show how to modify the microwave resonator performance after fabrication through surface engineering. In particular, we focus on titanium nitride (TiN)/silicon (Si) resonators because they have shown potential for achieving high-quality factors (Qis...
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关键词
Plasmas,Surface treatment,Surface morphology,Silicon,Rough surfaces,Surface roughness,Superconducting microwave devices
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