SiN Integrated Photonics for near-infrared LIDAR

Nicola A. Tyler,Daivid Fowler,Stephane Malhouitre,Stephane Brision,Olivier Lemonnier,Wilfried Rabaud,Bertrand Szelag

2018 IEEE CPMT Symposium Japan (ICSJ)（2018）

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摘要

We present a SiN photonic platform for applications in the 800-1000 nm wavelength range. We demonstrate low-loss waveguides, splitters, grating couplers and phase-shifters. We report on the use of integrated SiN circuits for LIDAR applications and show beam steering over 17.7° using a SiN integrated optical phased array.

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关键词

SiN,LIDAR,near-infrared

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