Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers

•Mirror-symmetric liquid ring channels lead to highly sensitive and low-crosstalk angular acceleration detection.•For the highly sensitive sensing element, a MEMS submicron-thick piezoresistive cantilever is utilized.•The differential pressure due to angular acceleration that is applied to the cantilever is in accordance with our calculated equations.