Use Of Hierarchical Cascading Technique For Fem Analysis Of Transverse Mode Behaviors In Surface Acoustic Wave Devices

This paper describes application of the hierarchical cascading technique (HCT) to the 3D FEM analysis of transverse mode behaviors in Surface acoustic wave (SAW) devices. Two methods are implemented; one is impedance calculation, and another is calculation of SAW scattering coefficients at boundaries. It is shown that HCT enables rapid calculation for successive simulation with scanning design parameters. Thus, techniques discussed in the paper are quite effective for optimization of device structures. It is also shown that GPGPU can accelerate the HCT calculation dramatically, especially for 3D cases discussed in this paper.