Laser-induced modification and formation of periodic surface structures (ripples) of amorphous GST225 phase change materials

Sergey Kozyukhin,Petr Lazarenko,Yuri Vorobyov,Alexander Baranchikov,Victoria Glukhenkaya,Mikhail Smayev,Alexey Sherchenkov,Yuliya Sybina, Alexander Polohin,Vladimir Sigaev

Optics & Laser Technology（2019）

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摘要

•Partial crystallization of GST225 films was triggering by a ten fs-pulse number.•Laser-induced periodic surface structures (ripples) were formed by fs-multipulses.•Fraction of crystalline phase differs between the ridges and valleys of the ripples.•The heterogeneous crystallization model explained the phase transformation in LIPSS.

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关键词

Phase change material,GST225,Femtosecond pulse laser,Periodic surface structures,Crystallization

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