Temperature Triggered Stoichiometry-Dependent Desorption From The Growth Interface Of Nanofilm

In this study, the desorption behaviors of codeposited atoms from the growth interface of multi-component-nanofilms have been explored through the experiments of vapor codeposition and molecular dynamics simulations. Experimentally, the stoichiometry-dependent desorption has been observed for atoms with weak surface binding, and it appears to be triggered by higher growth temperature, as inferred from the dependence of the amount of deposition on the stoichiometry of precursor films under different conditions. Numerically, we demonstrate that the sticking coefficient of weakly binding atoms depends strongly on the stoichiometry under high growth temperature. However, as the temperature decreases, the sticking coefficient becomes less sensitive to stoichiometry. The mechanisms associated with all the above phenomena have also been discussed. Published by AIP Publishing.