Inkjet-Printed Self-Aligned Short-Channel Metal-Oxide Thin-Film Transistors Based on Coffee Stripe Dewetting Method

IEEE Electron Device Letters(2019)

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摘要
It is difficult to implement high-resolution layer-to-layer alignment by direct inkjet printing because of the limitation of position accuracy of the common inkjet printer. The poor alignment of conventional printers generally causes large parasitic overlap capacitances between the gate and source/drain (S/D) of thin-film transistors (TFTs), which degrades device operating speeds. In this paper, a...
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关键词
Capacitance,Logic gates,Ink,Thin film transistors,Indium tin oxide,Substrates,Electrodes
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