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Structure and Mechanical Stresses in TaSi2/Si Multilayer

A. Yu Devizenko,I. A. Kopylets,V. V. Kondratenko,Y. P. Pershyn, I. Y. Devizenko,E. N. Zubarev, B. A. Savitskiy

Functional materials（2018）

Cited 0|Views8
Key words
multilayer,magnetron,zone plate,mechanical stress,crystallization
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