Synthesis and characterization of carbon-poor SiC nanowires via vapor-liquid-solid growth mechanism

CERAMICS INTERNATIONAL(2019)

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摘要
Nanowires growth via vapor-liquid-solid mechanism leads to high-quality SiC nanowires. C content is key issue affecting the morphology and composition of SiC nanowires. Here, we report the synthesis and growth mechanism of 3C-SiC nanowires containing reduced amount of C, which are grown on single-crystal Si via pyrolysis of polycarbosilane (PCS) by adjusting pyrolysis temperature and precursor. SiC nanowires have a diameter of 50 nm, while their thickness is 43.75 mu m. High-temperature stability of precursors with multiple side-chain groups has an impact on the reaction rate, in result the solid precursor state and pyrolysis temperature at 1350 degrees C are beneficial to the formation of pure carbon-poor SiC nanowires.
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关键词
SiC nanowires,Vapor-liquid-solid growth mechanism,Pyrolysis temperature,Precursor state
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