Biocompatible Organic/Inorganic Composite Film Packaging for Implantable Retinal Prosthesis

Although many groups worldwide have spent a lot of effort on developing devices for retinal prosthesis to restore blind eyesight, current technologies still lack of a reliable implantable packaging solution for high-density feedthroughs. Here, we propose the fabrication and latest testing results for a novel five-layer organic/inorganic film package sample, the organic parylene-C (PA) was deposited using chemical vapor deposition (CVD) and the inorganic aluminum oxide (Al ₂ O ₃ ) film was deposited using atomic layer deposition (ALD) method. The final sample has passed through the He leakage, biocompatible level test and the active soaking test, indicated its life time last for years.