Mid-Infrared GaN/AlGaN Quantum Cascade Detector Grown on Silicon

IEEE Electron Device Letters(2019)

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摘要
We demonstrate the first implementation of a GaN-based infrared photodetector epitaxially grown on silicon. The device is a GaN/AlGaN quantum cascade detector that consists of layered quantum well structure grown by plasma-assisted molecular beam epitaxy on a 4-in Si (111) substrate. The design, simulations, growth process, optical measurements and device performance are presented and discussed. T...
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关键词
Silicon,Gallium nitride,Temperature measurement,Detectors,Absorption,Photodetectors,Epitaxial growth
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