3D Photonic Technologies for Applications on a Chip and Optical Fiber

2018 12th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM)(2018)

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摘要
The laser lithography based on direct laser writing process (DLW) using nonlinear two-photon absorption in the focus of the laser beam in photoresist volume seems to be very promising in future photonics. This technology allows fabrication of polymer based structures in three dimensions achieving submicrometer resolutions and acceptable optical quality. Here we present four areas where three dimensional (3D) DLW laser lithography was used for 3D components fabrication: photonic crystal structures, photonic devices for waveguide optics, microstructures for lab on fiber and structures for lab on a chip.
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关键词
nonlinear two-photon absorption,three dimensional DLW laser lithography,microstructures,lab on fiber,lab on a chip,optical fiber,3D photonic technologies,waveguide optics,photonic devices,photonic crystal structures,3D components fabrication,acceptable optical quality,submicrometer resolutions,polymer based structures,photoresist volume,laser beam,direct laser writing process
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