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Half-threshold Bias Ioff Reduction Down to Na Range of Thermally and Electrically Stable High-Performance Integrated OTS Selector, Obtained by Se Enrichment and N-doping of Thin GeSe Layers

2018 IEEE Symposium on VLSI Technology(2018)

引用 34|浏览66
关键词
leakage current,thermal stability,GeSe layers,N-doping,Se enrichment,electrically stable high-performance integrated OTS selector,electrical stability,integrated 50nm OTS devices,half threshold bias,temperature 600.0 degC,current 1.0 nA,size 50.0 nm,current 23.0 MA,GeSe:N
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