An In-Depth Study Of High-Performing Strained Germanium Nanowires Pfets
2018 IEEE SYMPOSIUM ON VLSI TECHNOLOGY(2018)
摘要
An in-depth study of scaled nanowire Ge pFETs for digital and analog applications is proposed. Improved device characteristics are first obtained after gaining a good understanding of the HPA on device performance. Up to 45% higher I-D,I-SAT is obtained at I-OFF=3nA/fin when comparing to best Si GAA nFET and similar ID, SAT is found when benchmarking to mature 14/16nm pFinFET technology at -0.5 V-DD. The temperature dependent study of I-D,I-SAT highlights that the mechanism limiting the transport in Ge at short channel are neither purely diffusive nor fully ballistic.
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关键词
digital analog applications,improved device characteristics,device performance,temperature dependent study,high-performing strained germanium nanowire pFETS,pFinFET technology,silicon GAA nFET,analog applications,digital applications,size 14.0 nm,size 16.0 nm,voltage -0.5 V,Ge
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