High-sensitivity and fast-response fiber-optic micro-thermometer based on a plano-concave Fabry-Pérot cavity filled with PDMS

Sensors and Actuators A: Physical(2018)

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摘要
•The sensor obtains a high temperature sensitivity of 1.509 nm/°C due to the thermal expansion effect of PDMS.•The geometrical optics model and wave optics model of the plano-concave Fabry-Pérot cavity are first given in this paper.•The total length of the sensor is only 120 μm.
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关键词
Optical fiber sensor,Fabry-Pérot cavity,Liquid PDMS,Temperature
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