High resolution boron content profilometry at δ-doping epitaxial diamond interfaces by CTEM

•Boron content of δ-doped diamond layers are calculated by TEM.•Howie-Whelan equation is used to relate the TEM contrast with the boron content.•An iterative procedure is used to solve Howie-Whelan equation with two variables.•Lamella thickness and boron content are calculated from TEM contrast.•TEM boron content quantification agrees with that measured by SIMS.