MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism

Christian Huber, Pengfei Liu,Christoph Krammer,Benedikt Stein,Heinz Kalt

Journal of Microelectromechanical Systems（2018）

引用 5|浏览4

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摘要

This paper presents surface micromachined MEMS Fabry-Pérot interferometers (FPIs) with two released membrane mirrors. Fabrication of such FPIs with large-area membrane reflectors of up to 5 mm in diameter for first-order operation in the near infrared is shown. The mirrors are distributed Bragg reflectors based on silicon and silicon carbonitride. Single mirror membrane FPIs with the same mirror d...

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关键词

Mirrors,Substrates,Silicon,Micromechanical devices,Refractive index,Optical device fabrication

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