Modified Stoney’s equation with anisotropic substrates undergoing large deformations

Sai Sharan Injeti,Nihit Vyas,Ratna Kumar Annabattula

Mechanics Research Communications（2021）

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摘要

•Mismatch strain-curvature relations for thin films on anisotropic substrate under large deformation.•Comparison of the analytical results with numerical simulations for Silicon wafer substrates.•The derived expressions for anisotropic substrates show improvement over existing results in the literature.

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关键词

Stoney’s equation,Thin film,Anisotropic substrate,Large deformation

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