Single ended capacitive self-sensing system for comb drives driven XY nanopositioners

•Comb drive driven XY nanopositioning.•Capacitive self-sensing.•FDM techniques.•Comb drive capacitance analysis.•This approach can be extended to N-degree of freedom.•The geometry of the device allows using the device itself as a capacitive bridge.•The measured capacitive noise is 2.5 aF/√Hz.