Large-Area MEMS Tunable Fabry–Perot Filters for Multi/Hyperspectral Infrared Imaging

This paper reports on a MEMS tunable Fabry-Perot filter technology capable of achieving nanometer-scale optical flatness across a large mirror area of up to square centimeters without any extraneous stress management techniques. The device employs a single-layer tensile silicon or germanium membrane for the suspended top mirror. Optical characterization of the fabricated single-membrane-based tuna...