3D Auger quantitative depth profiling of individual nanoscaled III–V heterostructures

•The nanoscale chemical characterization of III–V heterostructures is performed using Auger depth profiling below decananometric spatial resolution.•Reliable indium quantification is achieved on planar structures for thicknesses down to 9nm.•Quantitative 3D compositional depth profiles are obtained on patterned structures, with sufficient lateral resolution to analyze one single trench.•The Auger intrinsic spatial resolution is estimated around 150–200nm using a comparison with HAADF-STEM.•Auger and SIMS provide reliable in-depth chemical analysis of such complex 3D heterostructures, in particular regarding indium quantification.