Influence Of Annealing On The Morphology Of The Vacuum-Free Coatings Nbnx, Nbnx : Si

V. N. Rogoz,A. P. Kuzmenko,O. V. Sobol, A. Plyushchyk

JOURNAL OF NANO- AND ELECTRONIC PHYSICS（2016）

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摘要

The paper describes the features of niobium nitride coating changes with the addition of silicon and impurities without him. Samples were prepared by magnetron sputtering at a negative potential U-s = -40 V on silicon substrate, exposed to high temperatures: 800 degrees C without vacuum.

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关键词

Morphology, Hardness, Annealing, NbNx, NbNx : Si, Phase and elemental analysis

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