Tunable MEMS VCSEL on Silicon substrate

Hitesh Kumar Sahoo,Thor Ansbæk,Luisa Ottaviano,Elizaveta Semenova, Fyodor Zubov,Ole Hansen,Kresten Yvind

IEEE Journal of Selected Topics in Quantum Electronics（2019）

引用 10|浏览1

暂无评分

摘要

We present the design, fabrication, and characterization of a MEMS VCSEL which utilized a silicon on insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding in order to improve the protection and control of the tuning element. This can enable more robust fabrication, a larger free spectral range, and bidirectional tuning of the MEMS element. The ...

查看译文

关键词

Micromechanical devices,Mirrors,Vertical cavity surface emitting lasers,Silicon,Cavity resonators,Substrates,Indium phosphide

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要