A Novel Model for the Resonance Frequency in Lamb Wave Resonators based on AlN

Current multiplexers, oscillators and active filters, commonly based on active devices, are fundamental components of any communication system, nevertheless, their performance is limited by the power consumption. Due to the high requirements in modern communication systems, the new topologies and the optimized design of each basic component must be a main issue to investigate. The piezoelectric resonators are passive devices that can replace some active components in oscillators and active filters. This work presents a novel model for the resonance frequency of any type of piezoelectric resonator. As a particular case, we use this in a Lamb Wave Resonator (LWR) with aluminum electrodes and Nitride Aluminum (AlN) as the piezoelectric layer. The experimental validation of the model was conducted using an LWR designed and fabricated at the INAOE’s facilities. The measured S parameters delivered a resonance frequency of 541 MHz; and this result was compared to that predicted by the proposed model, showing a relative error of 5.4%, which is much lower than the 18.8% obtained by using the standard design methodology.