Carbon Nanotube Schottky type Photodetectors for UV applications

•We fabricate a hybrid MWCNT/Si3N4/n-Si photodetector based on ordered MWCNTs and evaluate its performance in the UV, visual and near IR spectrum (200–1000 nm).•The basic device and some meaningful variations including additional layers are electrically and optically tested and compared.•The overall results suggest that all devices had a satisfactory performance in the visual part of the spectrum and that the basic structure had the better performance as a UV detector (EQE 90% @ 275 nm@ 7 V).•The aim of this work is to demonstrate that the growth of dense ordered MWCNTs can be successfully combined with other semiconductor clean room processes in order to fabricate photodetectors, provided that the side effects are taken into account and the process flow is selected appropriately.