Incorporation of ZnO Nanoparticles on Solution Processed Zinc Oxide Thin-Film Transistors

In this work, a simple, low-cost and reliable method for deposition of solution-processed Zinc oxide films with embedded ZnO nanoparticles (np-ZnO) at low deposition temperature is presented. The np-ZnO films are obtained by ultrasonic spray pyrolysis technique at 200 °C. The np-ZnO precursor solution is prepared at different nanoparticles content. After deposition, the np-ZnO films do not require any additional treatment. The np-ZnO films were characterized by Fourier transform infrared spectroscopy, X-ray diffraction and field emission scanning electron microscope. Moreover, a comparison of ZnO and np-ZnO based thin-film transistors (TFTs) is presented. The extracted field-effect mobility was 0.01 cm 2 /Vs for ZnO TFTs and 0.05 cm 2 /Vs for np-ZnO TFTs.